Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

357-360

DOI:

10.4028/www.scientific.net/MSF.433-436.357

Citation:

M. Mier et al., "Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers", Materials Science Forum, Vols. 433-436, pp. 357-360, 2003

Online since:

September 2003

Export:

Price:

$35.00

In order to see related information, you need to Login.