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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Simple Method for Mapping Optical Defects in...

Simple Method for Mapping Optical Defects in Insulating Silicon Carbide Wafers

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

357-360

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.357

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Online since:

September 2003

Authors:

M. Mier, John Boeckl, Matthew D. Roth, Cengiz M. Balkas, M. Nelson

Keywords:

Defect, Insulating, Micropipe, Silicon Carbide (SiC), Void

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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