Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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375-378

Citation:

V. Raineri et al., "Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy", Materials Science Forum, Vols. 433-436, pp. 375-378, 2003

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September 2003

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