Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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645-648

Citation:

Z. Zolnai et al., "Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide", Materials Science Forum, Vols. 433-436, pp. 645-648, 2003

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September 2003

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