A Study of HTCVD Renewing of the SiC Polycrystalline Source during the PVT Process

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

87-90

Citation:

L. Charpentier et al., "A Study of HTCVD Renewing of the SiC Polycrystalline Source during the PVT Process", Materials Science Forum, Vols. 433-436, pp. 87-90, 2003

Online since:

September 2003

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$38.00

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[2] A. Pisch, A.M. Feraria, C. Chatillon, E. Blanquet, M. Pons, C. Bernard, M. Anikin, R. Madar, Mat. Sci. Forum, Vol 338-342, (2000) pp.91-94.

[3] D. Chaussende, F. Baillet et al., this conference.

[4] F. Baillet, D. Chaussende et al., this conference.

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