Morphological Features of Sublimation-Grown 4H-SiC Layers

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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95-98

DOI:

10.4028/www.scientific.net/MSF.433-436.95

Citation:

D. Schulz and J. Doerschel , "Morphological Features of Sublimation-Grown 4H-SiC Layers", Materials Science Forum, Vols. 433-436, pp. 95-98, 2003

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September 2003

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