Comparison between Various Chemical Systems for the CVD Step in the CF-PVT Crystal Growth Method

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

135-138

Citation:

L. Auvray et al., "Comparison between Various Chemical Systems for the CVD Step in the CF-PVT Crystal Growth Method", Materials Science Forum, Vols. 457-460, pp. 135-138, 2004

Online since:

June 2004

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[1] D. Chaussende, F. Baillet, L. Charpentier, E. Pernot, M. Pons, R. Madar: to be published in J. Electrochem. Soc. 150 (2003).

DOI: https://doi.org/10.1149/1.1606689

[2] Y.M. Tairov, V.F. Tsvetkov: J. Crystal Growth 52 (1981) p.146.

[3] A. Ellison, thesis, Linköping university, (1992).

[4] CFD-ACE, CFD Research Corporation, Huntsville, AL 35805, USA, http: /www. cfdrc. com.

[5] Chemsheet is a product of VTT Chemical Technology.

[6] M.T. Schulberg, M.D. Allendorf, D.A. Outka: Mater. Res. Soc. Symp. Proc. 410 (1996) p.471.

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