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Structural and Electronic Properties of the 6H-SiC(0001)/Al₂O₃ Interface Prepared by Atomic Layer Deposition
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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Development of Sol-Gel MgO Thin Films for SiC...

Development of Sol-Gel MgO Thin Films for SiC Insulation Applications

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

1373-1376

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.1373

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Online since:

June 2004

Authors:

C. Bondoux, P. Prené, P. Belleville, F. Guillet, Robert Jérisian

Keywords:

Dielectric, Leakage Current, MIM, Schottky Barrier, Sol-Gel (SG), Thin MgO Films

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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