Development of Sol-Gel MgO Thin Films for SiC Insulation Applications

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1373-1376

Citation:

C. Bondoux et al., "Development of Sol-Gel MgO Thin Films for SiC Insulation Applications", Materials Science Forum, Vols. 457-460, pp. 1373-1376, 2004

Online since:

June 2004

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$38.00

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[2] R.J. Soukup, D.E. Spelioti: J. Appl. Phys., Vol. 41 (1970), p.3229.

[3] J. Singh: Semiconductor devices, an introduction (McGraw-Hill, 1994).

[4] J.R. Stevenson, E.B. Hensley : J. Appl. Phys. Vol. 32 (1961), p.166.

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