Electronic Properties of SiON/HfO2 Insulating Stacks on 4H-SiC (0001)

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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1361-1364

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V. V. Afanas'ev et al., "Electronic Properties of SiON/HfO2 Insulating Stacks on 4H-SiC (0001)", Materials Science Forum, Vols. 457-460, pp. 1361-1364, 2004

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June 2004

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