Effect of In-Situ Chemical Surface Treatments on AlN/SiC Interfacial Contamination

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1377-1380

Citation:

D.O. Stodilka et al., "Effect of In-Situ Chemical Surface Treatments on AlN/SiC Interfacial Contamination", Materials Science Forum, Vols. 457-460, pp. 1377-1380, 2004

Online since:

June 2004

Export:

Price:

$38.00

[1] J.D. Hartman, A.M. Roskowski, Z.S. Reitmeier, K.M. Tracy, R.F. Davis and R.J. Nemanich: J. Vac. Sci. Technol. A, 21(2), (2003) p.394.

[2] N. Onojima, J. Suda and H. Matsunami: J. of Crystal Growth, 237-239, (2002) p.1210.

[3] K.K. Harris, B.P. Gila, J. Deroaches, K.N. Lee, J.D. MacKenzie, C.R. Abernathy, F. Ren and S.J. Pearton: J. Electochem. Soc., 149, (2002) p.1128.

[4] C.L. Aardahl, J.W. Rogers, H.K. Yun, Y. Ono, D.J. Tweet, S.T. Hsu: Thin Solid Films, 346, (1999) p.174.

[5] A.R. Olszyna, A. Sokolowska, J. Szmidt, A. Werbowy and M. Barkowski: Intern. J. of Inorg, Mat., 3, (2001) p.1311.

Fetching data from Crossref.
This may take some time to load.