Self-Aligned Short-Channel Vertical Power DMOSFETs in 4H-SiC

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1393-1396

Citation:

M. Matin et al., "Self-Aligned Short-Channel Vertical Power DMOSFETs in 4H-SiC", Materials Science Forum, Vols. 457-460, pp. 1393-1396, 2004

Online since:

June 2004

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[3] G. Y. Chung, C. C. Tin, and J. R. Williams, Appl. Phys. Lett., 76, 1713, (2000).