Fast Oxidation of 4H-SiC at Room Temperature by Electrochemical Methods

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1353-1356

Citation:

H. Mikami et al., "Fast Oxidation of 4H-SiC at Room Temperature by Electrochemical Methods", Materials Science Forum, Vols. 457-460, pp. 1353-1356, 2004

Online since:

June 2004

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