Plasma-Assisted Molecular Beam Epitaxial Growth of AlN Films on Vicinal Sapphire (0001) Substrates

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1553-1556

DOI:

10.4028/www.scientific.net/MSF.457-460.1553

Citation:

X.-Q. Shen and H. Okumura, "Plasma-Assisted Molecular Beam Epitaxial Growth of AlN Films on Vicinal Sapphire (0001) Substrates ", Materials Science Forum, Vols. 457-460, pp. 1553-1556, 2004

Online since:

June 2004

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