In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1565-1568

Citation:

T. Suzuki and T. Inushima, "In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer", Materials Science Forum, Vols. 457-460, pp. 1565-1568, 2004

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June 2004

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[10] -9.

[10] -8.

[10] -7.

[10] -6.

[10] -5.

[10] -4 A B A B 100500 Itr[arb. units] s Current Density [A/cm.

[2] ] Electric Field [MV/cm].

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