In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1565-1568

DOI:

10.4028/www.scientific.net/MSF.457-460.1565

Citation:

T. Suzuki and T. Inushima, "In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer", Materials Science Forum, Vols. 457-460, pp. 1565-1568, 2004

Online since:

June 2004

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$35.00

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