Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

633-636

DOI:

10.4028/www.scientific.net/MSF.457-460.633

Citation:

T. Ujihara et al., "Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy ", Materials Science Forum, Vols. 457-460, pp. 633-636, 2004

Online since:

June 2004

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