Channel Hot-Carrier Effect of 4H-SiC MOSFET

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Abstract:

SiC MOSFET, as power device, can be expected to operate with high drain and high gate voltages, possibly leading to hot-carrier effect. However, hot-carrier degradation in a SiC MOSFET is difficult to detect because the as fabricated devices contain high level of defects. We report, for the first time, evidence of hot-carrier effect in 4H-SiC MOSFET. The result suggests that hot hole from impact ionization trapped in the oxide is the cause of the channel hot-carrier effect.

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Periodical:

Materials Science Forum (Volumes 615-617)

Pages:

813-816

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Online since:

March 2009

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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