Defect Evaluation of SiC Crystal Grown by Solution Method: The Study by Synchrotron X-Ray Topography and Etching Method

Shigeta Kozawa; Kazuaki Seki; Alexander Alexander; Yuji Yamamoto; Toru Ujihara; Yoshikazu Takeda

doi:10.4028/www.scientific.net/MSF.679-680.28

Paper Titles

On Application of Sublimation Epitaxy to Growth of Bulk 3C-SiC Crystals
p.12

Experimental Verification of a Novel System for the Growth of SiC Single Crystals
p.16

Quality Investigation of 3C-SiC Crystals Grown by CF-PVT Technique
p.20

Polytype Stability of 4H-SiC Seed Crystal on Solution Growth
p.24

Defect Evaluation of SiC Crystal Grown by Solution Method: The Study by Synchrotron X-Ray Topography and Etching Method
p.28

Effect of Low Frequency Magnetic Field on SiC Solution Growth
p.32

Crystal Growth of 4H-SiC on 6H-SiC by Traveling Solvent Method
p.36

The Effect of Process Parameters on 4H-SiC Single Crystal Grown by a PVT Method
p.40

Effect of the Seed Polarity for High Quality 4H-SiC Crystal Grown on 6H-SiC Seed by PVT Method
p.44

HomeMaterials Science ForumMaterials Science Forum Vols. 679-680Defect Evaluation of SiC Crystal Grown by Solution...

Defect Evaluation of SiC Crystal Grown by Solution Method: The Study by Synchrotron X-Ray Topography and Etching Method

Abstract:

We investigated dislocation behavior in the crystal grown on 6H-SiC (0001) by solution method using synchrotron X-ray topography and thermal chlorine etching. It was confirmed that basal plane dislocation was not newly formed in the grown layer. In addition, the positions of threading screw dislocations (TSDs) were displaced and some of them disappeared in the grown layer. This displacement was caused by the bending of the TSDs during growth.

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Materials Science Forum (Volumes 679-680)

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28-31

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.679-680.28

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Online since:

March 2011

Authors:

Shigeta Kozawa, Kazuaki Seki, Alexander Alexander, Yuji Yamamoto, Toru Ujihara, Yoshikazu Takeda

Keywords:

Dislocation, Silicon Carbide (SiC), Solution Growth, Synchrotron X-Ray, Topography

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