Rapid Terahertz Imaging of Carrier Density of 3C-SiC

Akihide Hamano; Seigo Ohno; Hiroaki Minamide; Hiromasa Ito; Yoshiyuki Usuki

doi:10.4028/www.scientific.net/MSF.725.57

Paper Titles

Study of Defects Generated by Standard- and Plasma-Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers
p.41

Different Dissociation Behavior of [11-20] and Non-[11-20] Basal Plane Dislocations in 4H-SiС under Electron Beam Irradiation
p.45

Density of Etch Pits on C-Face 4H-SiC Surface Produced by ClF₃ Gas
p.49

Rapid Terahertz Imaging of Carrier Density of 3C-SiC
p.57

Cathodoluminescence Study of Ammonothermal GaN Crystals
p.63

The Effect of the Indenter Orientation on the Formation of Dislocations and Cracks in (0001) GaN Bulk Crystals
p.67

Defect Propagation from 3C-SiC to III-Nitride
p.71

Characterization of Dislocations in GaN Thin Film and GaN/AlN Multilayer
p.75

HomeMaterials Science ForumMaterials Science Forum Vol. 725Rapid Terahertz Imaging of Carrier Density of...

Rapid Terahertz Imaging of Carrier Density of 3C-SiC

Abstract:

The reflectance around the longitudinal optical (LO) phonon frequency in the terahertz region changes with the carrier density of silicon carbide (SiC), while the reflectance around the transverse optical (TO) phonon frequency remains constantly high. The relative reflectance obtained from the reflectance at the two frequencies related to the TO and LO phonon was evaluated as a function of the carrier density of SiC. Two waves around these phonon frequencies can be generated easily using a tunable terahertz source. Nondestructive imaging of the carrier density of cubic SiC (3C-SiC) at the rate of 1 s per point was carried out successfully using this tunable terahertz source.

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Materials Science Forum (Volume 725)

Pages:

57-60

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.725.57

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Online since:

July 2012

Authors:

Akihide Hamano, Seigo Ohno, Hiroaki Minamide, Hiromasa Ito, Yoshiyuki Usuki

Keywords:

Carrier Density, Nondestructive Imaging, Silicon Carbide (SiC), Terahertz

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