Basal Plane Dislocations Created in 4H-SiC Epitaxy by Implantation and Activation Anneal

Robert E. Stahlbush; Nadeemullah A. Mahadik; Q. Jon Zhang; Albert A. Burk; Brett A. Hull; Jonathan Young

doi:10.4028/www.scientific.net/MSF.821-823.387

Paper Titles

Starting Point of Step-Bunching Defects on 4H-SiC Si-Face Substrates
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Surface Orientation Dependence of SiC Oxidation Process Studied by In Situ Spectroscopic Ellipsometry
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Tuning Optoelectronic Properties of 4H-SiC QDs Using -H, -OH and -F Surface Functionalisation
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SiC Device Manufacturing: How Processing Impacts the Material and Device Properties
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Basal Plane Dislocations Created in 4H-SiC Epitaxy by Implantation and Activation Anneal
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Estimation of Phosphorus-Implanted 4H-SiC Layer Recrystallization by Electron-Back-Scattering Diffraction Pattern Analysis
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Ohmic Contact on n-Type 3C-SiC Activated with SiO₂ Encapsulation
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Al⁺ Ion Implanted On-Axis <0001> Semi-Insulating 4H-SiC
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Shallow and Deep Levels in Al⁺-Implanted p-Type 4H-SiC Measured by Thermal Admittance Spectroscopy
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HomeMaterials Science ForumMaterials Science Forum Vols. 821-823Basal Plane Dislocations Created in 4H-SiC Epitaxy...

Basal Plane Dislocations Created in 4H-SiC Epitaxy by Implantation and Activation Anneal

Abstract:

Basal plane dislocations (BPDs) introduced into SiC epitaxial layers, 25 μm thick, by the combination of implantation and activation anneal are directly observed by ultraviolet photoluminescence (UVPL) imaging. BPD loops appear to originate at micron-sized or smaller areas at the surface. These loops expand by gliding along the basal plane in the offcut direction until the loops approach the substrate. The loops can glide perpendicular to the offcut direction by many millimeters.

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Materials Science Forum (Volumes 821-823)

Pages:

387-390

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.821-823.387

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Online since:

June 2015

Authors:

Robert E. Stahlbush*, Nadeemullah A. Mahadik, Q. Jon Zhang, Albert A. Burk, Brett A. Hull, Jonathan Young

Keywords:

Basal Plane Dislocation (BPD), BPD Glide, Implantation Damage, UVPL

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