[1]
Stephen E. Saddow and Anant K. Agarwal, Advances in Silicon Carbide Processing and Applications, Artech House Publishers(2004), Chapter 1, ISBN 1-58053-740-5.
DOI: 10.1186/1475-925x-4-33
Google Scholar
[2]
M. Nawaz, On the evaluation of gate dielectrics for 4H-SiC based power MOSFETs, Hindawi publishing corporation, Active and Passive Electronic Components(2015), Article ID 651527.
DOI: 10.1155/2015/651527
Google Scholar
[3]
A. Taube, S. Gierałtowskac, T. Gutta, T. Małachowskia, I. Pasternaka, T. Wojciechowskic, W. Rzodkiewicza, M. Sawickic and A. Piotrowskaa, Electronic properties of thin HfO2 films fabricated by ALD on 4H-SiC, Acta Physica Polonica A(2011).
Google Scholar
[4]
K. Y Cheong , J.H. Moon, T. J. Park, J. H. Kim, C. S. Hwang, H. Joon K., W. Bahng and N.K. Kim, Improved electronic performance of HfO2/SiO2 stacking gate dielectric on 4H-SiC, IEEE Transactions on Electron Devices(2007).
DOI: 10.1109/ted.2007.908545
Google Scholar
[5]
Mahapatra, R., Chakraborty, Amit. K., Horsfall, A. B., Wright, N. G., Beamson, G. and Coleman, Karl. S., Energy-band alignment of HfO2 /SiO2 /SiC gate dielectric stack, Applied Physics Letter(2008), 92, 042904.
DOI: 10.1063/1.2839314
Google Scholar
[6]
X. Kang, A. Caiafa, E. Santi, J. L. Hudgins and P. R. Palmer, Characterization and modeling of high-voltage field-stop IGBTs, IEEE Transactions on Industry Applications(2003), 922-928, Vol. 39, No. 4.
DOI: 10.1109/tia.2003.814547
Google Scholar
[7]
Synopsys Inc. Sentaurus device user manual, Ver K-2015. 06.
Google Scholar
[8]
Q. C. J. Zhang, S. H. Ryu, C. Jonas, A. K. Agarwal, J. W. Palmour, Simulations of 10 kV Trench Gate IGBTs on 4H-SiC, Materials Science Forum(2006), Vols. 527-529, pp.1405-1408.
DOI: 10.4028/www.scientific.net/msf.527-529.1405
Google Scholar
[9]
Y. Takeuchi, M. Kataoka, T. Kimoto, H. Matsunami, R. K. Malhan, SiC Migration Enhanced Embedded Epitaxial (ME3) Growth Technology, Materials Science Forum(2006), Vols. 527-529, pp.251-254.
DOI: 10.4028/www.scientific.net/msf.527-529.251
Google Scholar