Uniform Ultrathin Oxide Growth for High-k Preclean

Abstract:

• Periodical: Solid State Phenomena (Volumes 103-104)
• Pages: 15-18
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.103-104.15
• Online since: April 2005
• Authors: Jeffery W. Butterbaugh, Steven L. Nelson, Thomas J. Wagener
• Keywords: High-k, Oxide Growth, Ozonated Water, Ozone

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