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HomeSolid State PhenomenaSolid State Phenomena Vols. 103-104Interface State Densities and Surface Charge on...

Interface State Densities and Surface Charge on Wet-Chemically Prepared Si(100) Surfaces

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Ultra Clean Processing of Silicon Surfaces VII

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Periodical:

Solid State Phenomena (Volumes 103-104)

Pages:

23-26

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.103-104.23

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Online since:

April 2005

Authors:

Heike Angermann

Keywords:

Hydrogen-Termination, Native Oxidation, Silicon Surfaces, Spectroscopic Ellipsometry (SE), Surface Photo Voltage (SPV), Wet Chemical Cleaning

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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