The Effect of Various Process Induced Damages on Wet Etching Rate Difference

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

143-147

DOI:

10.4028/www.scientific.net/SSP.134.143

Citation:

H. G. Yoon et al., "The Effect of Various Process Induced Damages on Wet Etching Rate Difference ", Solid State Phenomena, Vol. 134, pp. 143-147, 2008

Online since:

November 2007

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$35.00

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