II: Ultra-Shallow Junction Cleaning: Methodologies for Process and Chemistry Optimization

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

133-137

DOI:

10.4028/www.scientific.net/SSP.134.133

Citation:

A. K. Srivastava et al., "II: Ultra-Shallow Junction Cleaning: Methodologies for Process and Chemistry Optimization ", Solid State Phenomena, Vol. 134, pp. 133-137, 2008

Online since:

November 2007

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$35.00

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