Confined Chemical Cleaning: A Novel Concept Evaluated for Front End of Line Applications

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

121-124

DOI:

10.4028/www.scientific.net/SSP.134.121

Citation:

I. Vos et al., "Confined Chemical Cleaning: A Novel Concept Evaluated for Front End of Line Applications", Solid State Phenomena, Vol. 134, pp. 121-124, 2008

Online since:

November 2007

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$35.00

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