Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

139-142

DOI:

10.4028/www.scientific.net/SSP.134.139

Citation:

S. Abu Jeriban et al., "Effect of Dopants on the Dissolution Behavior of Silicon Substrates in HF-Based Cleaning Solutions ", Solid State Phenomena, Vol. 134, pp. 139-142, 2008

Online since:

November 2007

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$35.00

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