Impact of Plasma and Diluted HF on a CoWP Material

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Periodical:

Solid State Phenomena (Volume 134)

Edited by:

Paul Mertens, Marc Meuris and Marc Heyns

Pages:

321-324

DOI:

10.4028/www.scientific.net/SSP.134.321

Citation:

D. Rébiscoul et al., "Impact of Plasma and Diluted HF on a CoWP Material", Solid State Phenomena, Vol. 134, pp. 321-324, 2008

Online since:

November 2007

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$35.00

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