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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Impact of Plasma and Diluted HF on a CoWP Material

Impact of Plasma and Diluted HF on a CoWP Material

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

321-324

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.321

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Online since:

November 2007

Authors:

Diane Rébiscoul, Lucile Broussous, N. Lopez, A. Roman, R. Kachtouli, L.G. Gosset, J. Guillan, Didier Louis, G. Passemard

Keywords:

Cleaning, Compatibility, CoWP, Plasma, SAB

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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