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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20

Solid State Phenomena Vols. 19-20

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20

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Table of Contents

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Paper Title Page

Application of Doped Polysilicon Layers in a BICMOS-Technology

Authors: G. Ritter, H.B. Erzgräber, D. Bolze

69

Self-Interstitial Atoms and Structure of Intrinsic Getter in Silicon Crystals

Authors: Liudmila I. Fedina, S.G. Denisenko, A.L. Aseev

79

Internal Gettering Effectiveness for Transition Metals /Fe,Ni/ in Cz-SI

Authors: U. Woijciechowski

85

Intrinsic Gettering of Radiation Defects in Silicon Caused by High-Temperature Oxygen-Containing Defects

Authors: V.B. Neimash, T.R. Sagan, V.M. Tsmots, V.M. Siratskii, V.I. Shakhovtsov, V.L. Shindich

87

Defect Engineering in Submicron CMOS Technologies

Authors: Cor Claeys, Jan Vanhellemont, Eddy Simoen

95

Contamination Control in Si ULSI-Technology at the 10¹¹cm^-3 - Level and below

Authors: Werner Bergholz, G. Zoth, G. Götz, A. Saliov

109

Point Defect Engineering for ULSI Silicide Processing

Authors: George A. Rozgonyi, J.W. Honeycutt

121

Defect Control and Gettering in Cz-Silicon

Authors: F.G. Kirscht, Eicke R. Weber, I. Babanskaya

137

Silicon Device Engineering by Intrinsic Point Defect Control

Authors: N.A. Sobolev, Yu.V. Vyzhigin, B.N. Gresserov, E.I. Sheck, A.I. Kurbakov, E.E. Rubinova, V.A. Trunov

169

Defect Engineering in a High-Voltage Substrate Technology

Authors: G. Kissinger, W. Kissinger, K. Tittelbach-Helmrich, U. Retzlaff, J. Knopke, K. Schmalz, G. Morgenstern

175

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