Gettering and Defect Engineering in Semiconductor Technology

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Authors: G. Span, G. Heigl, Erich Kasper
457
Authors: L.K. Orlov, O.A. Kuznetsov, R.A. Rubtsova, A.L. Chernov, V.I. Vdovin, N.A. Gorodilov, N.G. Kalugin, V.I. Gavrilenko
469
Authors: L. Goldstein, P. Pagnod-Rossiaux, F. Gaborit, P. Garabedian, M. Magnabal, F. Brillouet, M. Matabon
481
Authors: H. Pettersson, Hermann G. Grimmeiss, A.L. Powell, C.C. Button, J.S. Roberts, P.I. Rockett
489

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