Total Ionizing Dose (TID) Effects on the 1.2 kV SiC MOSFETs under Proton Irradiation

Article Preview

Abstract:

In this paper, the effects of various proton irradiation energies and doses on the electrical characteristics of SiC MOSFETs have been evaluated and characterized using a proton accelerator. The devices under test were designed, fabricated and packaged using 1.2 kV/0.6 µm-tech SiC MOSFET processes. The results demonstrate that the threshold voltage (Vth) of the irradiated devices shifted towards negative values due to the radiation-induced positive oxide trapped charges. Moreover, this negative shift in Vth and positive trapped charges of field limiting ring (FLR) oxide led to an increase in output currents and a reduction in the breakdown voltage values.

You might also be interested in these eBooks

Info:

* - Corresponding Author

[1] A. Mihaila, L. Knoll, E. Bianda, M. Bellini, S. Wirths, G. Alfieri, L. Kranz, F. Canales and M. Rahimo, 2018 IEEE International Electron Devices Meeting (San Francisco, CA, USA, 2018) p.19.2.1-19.2.4.

DOI: 10.1109/iedm.2018.8614480

Google Scholar

[2] A. R. Powell and L. B. Rowland, Proceedings of the IEEE 90, (2002) 942.

Google Scholar

[3] Q. Yu, W. Ali, S. Cao, H. Wang, H. Lv, Y. Sun, R. Mo, Q. Wang, B. Mei, J. Sun, H. Zhang, M. Tang, S. Bai, T. Zhang, Y. Bai and C. Zhang, IEEE Transactions on Nuclear Science 69, (2022) 1127.

DOI: 10.1109/tns.2021.3135123

Google Scholar

[4] Korea Electrotechnology Research Institute (www.keri.re.kr), SK powertech (www.ypt.co.kr).

Google Scholar

[5] D. Hu, J. Zhang, Y. Jia, Y. Wu, L. Peng and Y. Tang, IEEE Transactions on Electron Devices 65, (2018) 3719.

Google Scholar