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SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

759-764

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.759

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Online since:

November 2001

Authors:

Stefano Ventola, Julien Fort, Francesco La Spada, Paolo Maniscalco

Keywords:

Energy Dispersive X-Ray (EDX), High Density Plasma Chemical Vapor Deposition, Multiple Perspective SEM Imaging MPSITM, Preventive Maintenance (PM), Scanning Electron Microscope (SEM), Wafer in Progress WIP

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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