SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

759-764

DOI:

10.4028/www.scientific.net/SSP.82-84.759

Citation:

S. Ventola et al., "SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition", Solid State Phenomena, Vols. 82-84, pp. 759-764, 2002

Online since:

November 2001

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Price:

$35.00

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