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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Evaluation of Effective Carrier Lifetime in...

Evaluation of Effective Carrier Lifetime in Epitaxial Silicon Layers

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

771-776

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.771

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Online since:

November 2001

Authors:

Hele Väinölä, J. Storgårds, Marko Yli-Koski, Juha Sinkkonen

Keywords:

Built-In Potential, Carrier Lifetime, Continuity Equation, Epitaxial Layer, Photoconductivity Decay

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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