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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Ellipsometric Study of Ion-Implantation Damage in...

Ellipsometric Study of Ion-Implantation Damage in Single-Crystal Silicon - An Advanced Optical Model

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

765-770

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.765

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Online since:

November 2001

Authors:

P. Petrik, O. Polgár, T. Lohner, M. Fried, N.Q. Khánh, J. Gyulai

Keywords:

Damage Profile, Ion Implantation, Optical Model, Spectroscopic Ellipsometry (SE)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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