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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Structure and Stability of Thin Praseodymium Oxide...

Structure and Stability of Thin Praseodymium Oxide Layers on Si(001)

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

783-788

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.783

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Online since:

November 2001

Authors:

Hans Joachim Müssig, Jaroslaw Dąbrowski, K. Ignatovich, J.P. Liu, V. Zavodinsky, H.J. Osten

Keywords:

Ab Initio Simulation, AES, Heteroepitaxial Growth, High-K Gate Material, Initial Stages, STM, X-Ray Photoelectron Spectroscopy (XPS)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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