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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Characterization of Interfacial States at Silicon...

Characterization of Interfacial States at Silicon Bicrystals

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

801-806

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.801

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Online since:

November 2001

Authors:

G.N. Kamaev, S.V. Golod, E.M. Skok, A.K. Fedotov, A.V. Mazanik

Keywords:

Defect, Direct Bonding, Grain Boundary, Interface, Microwave Transient Photoconductivity, Polycrystal, Silicon, Silicon-on-Insulator (SOI)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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