Paper Titles

A Technique for Delineating Defects in Silicon
p.753

SEM Vision Periodic Defect Review and Characterization after Inter-Metal Dielectric Deposition
p.759

Ellipsometric Study of Ion-Implantation Damage in Single-Crystal Silicon - An Advanced Optical Model
p.765

Evaluation of Effective Carrier Lifetime in Epitaxial Silicon Layers
p.771

Spatial Distribution of Strain and Phases in Si Nano-Indentation Analysed by Raman Mapping
p.777

Structure and Stability of Thin Praseodymium Oxide Layers on Si(001)
p.783

Structural Investigations of Praseodymium Oxide Epitaxially Grown on Silicon
p.789

1D-ACAR Studies of As-Grown Impurity Centers in Silicon
p.795

Characterization of Interfacial States at Silicon Bicrystals
p.801

HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Spatial Distribution of Strain and Phases in Si...

Spatial Distribution of Strain and Phases in Si Nano-Indentation Analysed by Raman Mapping

Article Preview

Abstract:

You might also be interested in these eBooks

Gettering and Defect Engineering in Semiconductor Technology IX

Info:

Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

777-782

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.777

Citation:

Cite this paper

Online since:

November 2001

Authors:

F. Demangeot, P. Puech, V. Paillard, V. Domnich, Yu.G. Gogotsi

Keywords:

Metastable Phases, Raman Mapping, Si Nano-Indentation, Strain

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2002 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: