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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Structural Investigations of Praseodymium Oxide...

Structural Investigations of Praseodymium Oxide Epitaxially Grown on Silicon

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

789-794

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.789

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Online since:

November 2001

Authors:

P. Zaumseil, E. Bugiel, J.P. Liu, H.J. Osten

Keywords:

Heteroepitaxial Growth, High-K Gate Material, TEM, X-Ray Diffraction (XRD)

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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