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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Characterisation of Surface and Near-Surface...

Characterisation of Surface and Near-Surface Regions in High-Purity Cz Si

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

747-752

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.747

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Online since:

November 2001

Authors:

Antonio Castaldini, Daniela Cavalcoli, Anna Cavallini, T. Minarelli, E. Susi

Keywords:

B Deactivation, Deep Traps, DLTS, Hydrogen, Wet Etching

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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