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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Can we Increase the Effiency of Organic...

Can we Increase the Effiency of Organic Contamination Removal by Ozone/DI-Water Processes by Using Additives?

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

215-218

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.215

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Online since:

May 2003

Authors:

F. De Smedt, H. Vankerckhoven, Stefan De Gendt, Marc Heyns, Chris Vinckier

Keywords:

Contamination, Modeling, Organics, Ozone, Promotor, Radical, RHEA, Scavenger

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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