New Residue Removal Method Using Ozonated Water with Phosphoric Acid

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

219-222

DOI:

10.4028/www.scientific.net/SSP.92.219

Citation:

I. Oya et al., "New Residue Removal Method Using Ozonated Water with Phosphoric Acid", Solid State Phenomena, Vol. 92, pp. 219-222, 2003

Online since:

May 2003

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$35.00

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