Novel Photoresist Removal Using Atomic Hydrogen Generated by Heated Catalyzer

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

231-234

DOI:

10.4028/www.scientific.net/SSP.92.231

Citation:

T. Miki et al., "Novel Photoresist Removal Using Atomic Hydrogen Generated by Heated Catalyzer", Solid State Phenomena, Vol. 92, pp. 231-234, 2003

Online since:

May 2003

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Price:

$35.00

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