New Contact Cleaning in HF & N2/H2 Microwave Plasma

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

239-242

DOI:

10.4028/www.scientific.net/SSP.92.239

Citation:

Y.B. Kim et al., "New Contact Cleaning in HF & N2/H2 Microwave Plasma", Solid State Phenomena, Vol. 92, pp. 239-242, 2003

Online since:

May 2003

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$35.00

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