Ammonium Nitrate Cleaning Process for Post Metal Photo-Resister Removing

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

251-254

DOI:

10.4028/www.scientific.net/SSP.92.251

Citation:

C.-H. Lo and F. Y. Chen, "Ammonium Nitrate Cleaning Process for Post Metal Photo-Resister Removing", Solid State Phenomena, Vol. 92, pp. 251-254, 2003

Online since:

May 2003

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Price:

$35.00

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