Defectivity Study of Cu Metallization Process by Dark- and Bright-Field Inspection

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

281-286

DOI:

10.4028/www.scientific.net/SSP.92.281

Citation:

L. Carbonell et al., "Defectivity Study of Cu Metallization Process by Dark- and Bright-Field Inspection", Solid State Phenomena, Vol. 92, pp. 281-286, 2003

Online since:

May 2003

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$35.00

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