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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Supercritical Carbon Dioxide Cleaning of Low-k...

Supercritical Carbon Dioxide Cleaning of Low-k Material

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

297-300

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.297

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Online since:

May 2003

Authors:

Gary Asai, Y. Muraoka, K. Saito, I. Mizobata, T. Iwata, K. Masuda, K. Iijima, T. Yoshikawa, D. Peters

Keywords:

Low-K, Post-Ash Clean, SCCO2, Stripper, ULK

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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