New Dry Tool after Cleaning of Low-k Dielectrics

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

287-292

DOI:

10.4028/www.scientific.net/SSP.92.287

Citation:

S. Okuda et al., "New Dry Tool after Cleaning of Low-k Dielectrics", Solid State Phenomena, Vol. 92, pp. 287-292, 2003

Online since:

May 2003

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$35.00

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