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Solid State Phenomena
Vol. 92
Solid State Phenomena
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Solid State Phenomena Vol. 92

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92

ToC:

Table of Contents

Paper Title Page

Supercritical Carbon Dioxide Processing of Porous Methylsilsesquioxane(PMSQ) Low-k Dielectric Films
Authors: Hunter John Martinez, Thieu Jacobs, Josh Wolf, Laura Rothman
293
Supercritical Carbon Dioxide Cleaning of Low-k Material
Authors: Gary Asai, Y. Muraoka, K. Saito, I. Mizobata, T. Iwata, K. Masuda, K. Iijima, T. Yoshikawa, D. Peters
297
Removal of Heavy Organics by Supercritical CO2
Authors: Akshey Sehgal, M.R. Yalamanchili, C. Millet, Adrien Danel, F. Tardif
301

Showing 71 to 73 of 73 Paper Titles

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