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HomeSolid State PhenomenaSolid State Phenomena Vol. 92

Solid State Phenomena Vol. 92

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92

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Table of Contents

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Paper Title Page

Evaluation of Organic Contamination on Si Wafers in Fab Environments

Authors: Joong S. Jeon, Colman Wong, Susanne Ohsiek, Hyeon S. Kim, Bob Ogle

125

Selective Wet Etching of High-k Gate Dielectrics

Authors: Kurt K. Christenson, Brent Schwab, Thomas J. Wagener, Bruce Rosengren, Deborah J. Riley, Joel Barnett

129

Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

Authors: P. Leiderer, M. Mosbacher, J. Boneberg, C. Bartels, F. Lang, Conrado R.M. Afonso, D. Baeuerle

133

A Comprehensive Model for Cleaning Semiconductor Wafers

Authors: Gretchen Burdick, Sean Eichenlaub, Neil Berman, Stephen Beaudoin

135

Effect of Transient pH on Particle Deposition during Immersion Rinsing

Authors: Wim Fyen, Kai Dong Xu, Rita Vos, Guy Vereecke, Paul W. Mertens, Marc Heyns

139

Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank

Authors: Guy Vereecke, Marc Heyns, Rita Vos, M. Schmidt, Frank Holsteyns, M. Baeyens, S. Gomme, James Snow, Paul W. Mertens, V. Coenen, T. Bauer

143

Influence of Frequency on the Removal Efficiency of Nano-Particles in a Megasonic Spray Cleaning Tool

Authors: M. Schmidt, Guy Vereecke, Rita Vos, Frank Holsteyns, M. Baeyens, Paul W. Mertens

147

A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation

Authors: Jeffrey M. Lauerhaas, Yi Wu, Mario Bran, Brian Fraser, Eric Brause, Tom Nicolosi

151

Removal of Small (<100-nm) Particles and Metal Contamination in Single-Wafer Cleaning Tool

Authors: Atsuro Eitoku, Rita Vos, James Snow, M. Sato, S. Hirae, Kazuo Nakajima, M. Nonomura, M. Imai, Paul W. Mertens, Marc Heyns

157

Relation between Particle Density and Haze on a Wafer: a New Approach to Measuring Nano-Sized Particles

Authors: Kai Dong Xu, Rita Vos, Guy Vereecke, Marcel Lux, Wim Fyen, Frank Holsteyns, Karine Kenis, Paul W. Mertens, Marc Heyns, Chris Vinckier

161

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