Ion Implantation in Semiconductors
Solid State Phenomena Volumes 1 - 2
doi:10.4028/www.scientific.net/SSP.1-2
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p203
Defects in SIMOX Structures
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288 K
]
Authors: R.C. Barklie
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p211
A Review of Deep Levels in Donor-Ion Implanted GaAs
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1 M
]
Authors: D.W.E. Allsopp
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p247
Ion Implantation in GaAs
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1 M
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Authors: S.J. Pearton
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p281
Rapid Isothermal Annealing of Ion Implanted Gallium-Arsenide
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2 M
]
Authors: Sukhdev Singh Gill
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p343
Defects and Doping Effects in CdTe and CulnS2 by Phosphorus Ion Implantation and Pulsed Electron Beam Annealing
[
536 K
]
Authors: H.Y. Ueng, H.L. Hwang
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p361
Implantation of Silicon in Indium Phosphide for Metal Insulator Semiconductor Transistors
[
479 K
]
Authors: N. Duhamel, G. Post, P. Krauz, P. Henoc, B. Descouts
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p371
Thermal Annealing of Be Implanted InSb
[
332 K
]
Authors: H. Alberts, R. Cilliers
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p377
Range of Various Implanted Ions in III-V Materials
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811 K
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Authors: Pierre-Noel Favennec, M. Gauneau, M. Salvi
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p417
The Compositional Disordering of AlGaAs/GaAs Superlattices by Si and Be Ion Implantation
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311 K
]
Authors: Jyunji Kobayashi
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p429
Low-Energy Hydrogen-Ion Implantation in Zinc Oxide
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1 M
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Authors: G. Yaron, Y. Goldstein, A. Many
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p457
Optical Properties of Hydrogen-Implanted Semiconductors
[
400 K
]
Authors: Jakub Tatarkiewicz
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p465
Structure of Radiation Damage in Germanium Induced by Te+-Implantation Near Channeling Conditions
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651 K
]
Authors: M.G. Kalitzova, D.S. Karpuzov, N.K. Pashov