Influence of Cell Structure and Topology on Coss of 4H-SiC MOSFET

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Abstract:

This study demonstrates that the output capacitance (Coss) of a 4H-SiC MOSFET is proportional to the length of JFET (LJFET) at a low Vds, since under this condition, the gate-to-drain capacitance (Cgd) may account for nearly half of Coss. Furthermore, when Vds is low, the Coss of MOSFETs with square and hexagonal cell topologies is approximately 20% and 25% higher than that of MOSFETs with the strip cell topology, respectively, due to larger JFET areas. However, when Vds is higher, the Coss of MOSFETs with square and hexagonal cell topologies is lower because of the lower drain-to-source capacitance (Cds) resulting from smaller Pwell areas. The split-gate MOSFET can reduce Cgd, but the smaller poly-gate area decreases the depletion capability, resulting in a higher Cds. As LJFET of the MOSFET decreases, Cgd becomes lower, which may shorten the switching time, but due to the increased length of Pwell (LPW), the reverse recovery current (Irr) increases. This study proposes partially increasing the gate oxide thickness. Although this may slightly increase Cds, the shorter switching time results in a 5% reduction in the turn-on switching loss (Eon).

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[1] H. Jiang, J. Wei, X. Dai, C. Zheng, M. Ke, X. Deng, Y. Sharma, I. Deviny and P. Mawby, "SiC MOSFET with Built-in SBD for Reduction of Reverse Recovery Charge and Switching Loss in 10-kV Applications," 2017 29th International Symposium on Power Semiconductor Devices and IC's (ISPSD), Sapporo, Japan, 2017, pp.49-52.

DOI: 10.23919/ISPSD.2017.7988890

Google Scholar

[2] J. Wei, M. Zhang, H. Jiang, X. Zhou, B. Li and K. J. Chen, "Superjunction MOSFET with Dual Built-In Schottky Diodes for Fast Reverse Recovery: A Numerical Simulation Study," in IEEE Electron Device Letters, vol. 40, no. 7, pp.1155-1158, July 2019, doi: 10.1109/ LED.2019.2917556.

DOI: 10.1109/led.2019.2917556

Google Scholar

[3] S. Jahdi, O. Alatise, R. Bonyadi, P. Alexakis, C. A. Fisher, J. A. Ortiz Gonzalez, L. Ran and P. Mawby, "An Analysis of the Switching Performance and Robustness of Power MOSFETs Body Diodes: A Technology Evaluation," in IEEE Transactions on Power Electronics, vol. 30, no. 5, pp.2383-2394, May 2015.

DOI: 10.1109/TPEL.2014.2338792

Google Scholar

[4] R. C. Wu, K. Y. Lee and P. C. Liao, "Adjustment of Abrupt Drops in the C-V Curves of Various 4H-SiC MOSFETs and JBS Diodes," IEEE Electron Device Letters, vol. 46, no. 2, p.135–138, 2025.

DOI: 10.1109/LED.2024.3522278

Google Scholar

[5] R. C. Wu, K. Y. Lee, Y. Y. Wen and P. C. Liao, "The Correlation of the Drain-source Capacitance Variation and the P-pillar Structures in a 4H-SiC Quasi Super Junction MOSFET," Materials Science in Semiconductor Processing, vol. 178, 108413, 2024.

DOI: 10.1016/j.mssp.2024.108413

Google Scholar

[6] A. Agarwal, K. Han, and B. J. Baliga, "Impact of Cell Topology on Characteristics of 600V 4H-SiC Planar MOSFETs," IEEE Electron Device Letters, vol. 40, no. 5, pp.773-776, 2019.

DOI: 10.1109/LED.2019.2908078

Google Scholar

[7] H. Wu, H. Luo, J. Zhang, B. Zheng, R. Wang, and X. Chen, "Comparison and Analysis on Static and Dynamic Performance of 1.2-kV SiC Planar MOSFETs with Different Cell Topologies," Materials Science in Semiconductor Processing, vol. 184, 108849, 2024.

DOI: 10.1016/j.mssp.2024.108849

Google Scholar

[8] Z. Y. Ye, L. Liu, Y. Yao, M. Z. Lin and P. F. Wang, "Fabrication of a 650V Superjunction MOSFET with Built-in MOS-Channel Diode for Fast Reverse Recovery," in IEEE Electron Device Letters, vol. 40, no. 7, pp.1159-1162, July 2019.

DOI: 10.1109/LED.2019.2915008

Google Scholar

[9] S. Roy, A. Bhattacharyya, C. Peterson, S. Krishnamoorthy, "β-Ga₂O₃ Lateral High-Permittivity Dielectric Superjunction Schottky Barrier Diode with 1.34 GW/cm² Power Figure of Merit," IEEE Electron Device Letters, 43(12), 2037-2040, 2022.

DOI: 10.1109/LED.2022.3216302

Google Scholar