Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

Abstract:

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Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

Info:

Periodical:

Key Engineering Materials (Volumes 421-422)

Edited by:

Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki

Pages:

95-98

DOI:

10.4028/www.scientific.net/KEM.421-422.95

Citation:

T. Aoki et al., "Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film", Key Engineering Materials, Vols. 421-422, pp. 95-98, 2010

Online since:

December 2009

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Price:

$35.00

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