Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

Tsuyoshi Aoki; Shigeyoshi Umemiya; Masaharu Hida; Kazuaki Kurihara

doi:10.4028/www.scientific.net/KEM.421-422.95

Paper Titles

Origin of High Q for Microwave Complex Perovskite
p.77

ZnO Nanoarrays Film Grown by Forced-Hydrolysis-Initiated-Nucleation Technique and its Photo-Induced Electrical Property
p.83

Effect of Incubation Time on Deposition Behavior of Ruthenium Films by MOCVD Using (2,4-Dimethylpentadienyl)(Ethylcyclopentadienyl)Ruthenium
p.87

Effects of UV Irradiation on Microstructure and Properties of HfO₂ Films Prepared from Alkoxy-Derived Precursor Solution
p.91

Measurement of d₁₅ Shear-Mode Piezoelectric Response in PZT Thin Film
p.95

Polarized Raman Study for Epitaxial PZT Thick Film with the Mixture Orientation of (100)/(001)
p.99

Effect of PAA-NH₄ Dispersant on Dispersibility of Aqueous Pb(Zr, Ti)O₃ Slurries and Piezoelectric Properties of Resultant Sintered Bodies
p.103

Resistance Changes of (La, Sr)MnO₃ Thin Film via Exchange Bias Tuning by the Application of an External Electric Field
p.107

Ferroelectric Properties of Epitaxial BiFe_0.97Mn_0.03O₃ Thin Films with Different Crystal Orientations Deposited on Buffered Si Substrates
p.111

HomeKey Engineering MaterialsKey Engineering Materials Vols. 421-422Measurement of d15 Shear-Mode Piezoelectric...

Measurement of d₁₅ Shear-Mode Piezoelectric Response in PZT Thin Film

Abstract:

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.